News
- Nanoscale Thermo-Chemical Processing
- December 21st, 2009 at 4:00pm
- Mechanical Science and Engineering professor William King and post doctoral associate Zhenting Dai demonstrated nanoscale chemical surface patterning of different chemical species in independent nanopatterns by the iterative application of thermochemical nanolithography.
- Nanotechnology heaters and thermometers for thermal processing of nanomaterials
- February 13th, 2009 at 9:41am
- While most previous research on this kind of microcantilever heaters and thermometers used device elements that were several micrometers in size, researchers have now reported an approach to fabricate a 100 nanometer-sized heater/thermometer using contact photolithography and controlled anneal conditions.
- Under pressure at the nanoscale, polymers play by different rules
- October 2nd, 2008 at 6:46pm
- William P. King, a Kritzer Faculty Scholar and professor of mechanical engineering at Illinois, has discovered that at very short length scales the polymer does not play by the rules.
About Us
We design, fabricate, and use tools for thermal and thermomechanical processing at micrometer and nanometer length scales. Our research involves the use of atomic force microscopy (AFM) and nanoimprint lithography for thermal and thermomechanical modification of surfaces. This work lies at the intersection of thermal transport science, materials science, and micro-electromechanical systems (MEMS). Because we form nanometer-scale modifications with MEMS tools, this work can be thought of as a 'top-down' nanotechnology, where individual nanometer-scale physical phenomena are actuated and sensed via micromachined transducers.
The Nanoscale Thermal Processing Laboratory is directed by Professor William P. King of the Mechanical Science and Engineering Department at the University of Illinois at Urbana-Champaign.
Our activities are located in Rooms 51, 53, and 120 of the Mechanical Engineering Building (MEB), and in the various micro/nanofabrication facilities across campus.